WAFER LIFT APPARATUS TO PREVENT BENDING OF LIFT PLATE

摘要

PURPOSE: A wafer lift apparatus is provided to prevent a bending phenomenon of a lift plate due to support pins by improving a structure of the lift plate. CONSTITUTION: A wafer lift apparatus includes a lift actuator, a lift shaft, a lift plate, and a plurality of wafer support pins. The lift actuator(112) is formed with an air cylinder. The lift shaft(114) is elevated by the lift actuator. The lift plate(116) is installed horizontally to an end of the lift shaft. The wafer support pins are installed on an upper surface of the lift plate in order to support a wafer. The thickness of the lift plate is gradually reduced toward the end of the lift plate in order to minimize a load applied to the end of the lift shaft.