发明名称 |
SCANNING PROBE MICROSCOPE AND SPECIMEN SURFACE STRUCTURE MEASURING METHOD |
摘要 |
A digital probing type atomic force microscope (AFM) for measuring high aspect structures with high precision. A probe 21 is vibrated while moved to the vicinity of an atomic force region on a specimen surface. The position of the probe is measured when a specified atomic force is detected in the atomic force region. The probe is then moved away from the specimen surface. A servo system for maintaining a gap between the probe and specimen surface is stopped. The probe is moved to a measurement point along the specimen surface while kept away from the specimen. The vibration frequency is a frequency slightly offset from the cantilever resonance point. The atomic force is detected based on the vibration amplitude of the cantilever. |
申请公布号 |
KR20040096530(A) |
申请公布日期 |
2004.11.16 |
申请号 |
KR20047011279 |
申请日期 |
2003.02.05 |
申请人 |
|
发明人 |
|
分类号 |
G01B21/30;G01Q10/04;G01Q10/06;G01Q20/02;G01Q60/24;G01Q60/32;G01Q60/38;G01Q70/12 |
主分类号 |
G01B21/30 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|