Handler provided with a temperature control unit

摘要

A handler includes first and second cooling channels, and first and second supply channels. The first and second cooling channels correspond to housing pockets that are respectively heated by heaters. A first throttle valve controls the flow of refrigerant such that the amount of refrigerant flowing through the second cooling channel is larger than the amount of the refrigerant flowing through the first cooling channel. Temperature sensors detect the temperature of the respective housing pockets, and a control device controls the valve and the heaters so that a target temperature is maintained.

主权项

1. A handler, comprising:
a first cooling channel through which refrigerant passes to cool a first support portion provided to support a part; a second cooling channel through which refrigerant passes to cool a second support portion different from the first support portion and provided to support a part; a first heater provided to heat the first support portion; a second heater different from the first heater and provided to heat the second support portion; a first temperature sensor provided to detect the temperature of the first support portion; a second temperature sensor different from the first temperature sensor and provided to detect the temperature of the second support portion; and a refrigerant supply unit which supplies refrigerant to the first cooling channel and the second cooling channel via a flow amount control valve,
the first cooling channel and the second cooling channel being connected with the refrigerant supply unit in parallel, andthe handler further including a controller which varies the opening and closing of the flow amount control valve and the output of the first heater based on a temperature value detected by the first temperature sensor, and varies the output of the second heater based on a temperature value detected by the second temperature sensor.