SEMICONDUCTOR FABRICATING EQUIPMENT WITH INTERLOCK SWITCH IN SIGNAL LINE FOR TRANSFERRING VENT SIGNAL FROM CONTROL UNIT TO SOLENOID VALVE

摘要

PURPOSE: Semiconductor fabricating equipment with an interlock switch is provided to prevent a vent process from being performed even if a vent button is selected due to an operator's error by installing an interlock switch in a signal line for transferring a vent signal from a control unit to a solenoid valve. CONSTITUTION: A predetermined process is performed in a reaction chamber(10). A predetermined condition of manipulation is selected by a touch screen(23). A control unit(20) receives a manipulation signal of the touch screen and outputs a predetermined drive signal according to the manipulation signal. The solenoid valve(25) switches on/off an air supply line(26) according to a drive signal output from the control unit, connected to the control unit by a signal line(21). A vent valve(15) is operated by the air supplied through the air supply line and opens a vent gas supply line(16). The interlock switch(22) switches on/off the signal line, installed in the signal line.