THIN FILM FORMING APPARATUS, FILM SUPPLYING INSTRUMENT, INSTRUMENT AND METHOD FOR CARRYING FILM RECEIVING CASSETTE TO FORM THIN FILM ON SUBSTRATE USING SHEET FILM

摘要

PURPOSE: A thin film forming apparatus is provided to form a thin film on a substrate using a sheet film by making a carrier unit in a process part carry a sheet film and/or a substrate among a coating unit, a transcribing unit and a separating unit. CONSTITUTION: A film supplying unit(7) supplies a sheet film. A coating unit(3) coats a coating solution on the surface of the sheet film supplied from the film supplying unit. A transcribing unit(5) makes the sheet film having a thin film cohere to a substrate supplied from an indexer part so as to form coherence material and transcribe the thin film into the substrate. A separating unit(6) separates the sheet film from the coherence. A carrier unit carries the sheet film and/or the substrate among the film supplying unit, the coating unit, the transcribing unit and the separating unit.