VERFAHREN ZUR TROCKNUNG EINES SUBSTRATS,申请号AT19990935126T-传众专利搜索

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发明名称	VERFAHREN ZUR TROCKNUNG EINES SUBSTRATS
摘要
申请公布号	AT280935(T)	申请公布日期	2004.11.15
申请号	AT19990935126T	申请日期	1999.08.10
申请人	TOHO KASEI LTD.;DAIKIN INDUSTRIES, LTD.	发明人	MAEDA, NORIO;SUMI, KOJI;AIHARA, HIROSHI;OONO, MASAO;IZUTANI, NAOAKI
分类号	H01L21/304;B05B7/04;B08B3/04;H01L21/00;(IPC1-7):F26B21/00	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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