STATIC ELECTRICITY REMOVER USING SOFT X-RAY HAVING WAVELENGTH BETWEEN 1.2 ANGSTROM AND 1.5 ANGSTROM

摘要

PURPOSE: A static electricity remover using a soft X-ray is provided to remove static electricity from a surface of a glass substrate or a surface of a wafer by using the soft X-ray. CONSTITUTION: A head unit(100) is used for generating a soft X-ray having a wavelength between 1.2 angstrom and 1.5 angstrom in order to neutralize or weaken electricity of a target and ionizing gas molecules in order to remove the static electricity within inert gases. A soft X-ray protector(200) is used for covering the head part in order to prevent the leakage of the soft X-ray. A power control unit(300) is electrically connected to the head part and the soft X-ray protector in order to supply a filament voltage and a target voltage for to a soft X-ray tube.