DEVELOPING APPARATUS FOR SEMICONDUCTOR WAFER TO REDUCE DEVELOPING SOLUTION CONSUMPTION

摘要

PURPOSE: A developing apparatus for a semiconductor wafer is provided to reduce the developing solution consumption and the manufacturing cost by recycling the unused developing solution. CONSTITUTION: A semiconductor wafer(200) is loaded on a chuck(100). A developing solution supply nozzle(400) is used for injecting a developing solution into the semiconductor wafer loaded on the chuck. A bowl(300) is used for surrounding the outside of the wafer loaded on the chuck. An induction unit(500) induces the flow of the developing solution from the developing solution supply nozzle to the outside of the bowl.