| 摘要 |
PROBLEM TO BE SOLVED: To rapidly and accurately detect the temperature of a material at the time of processing in semiconductor manufacturing equipment. SOLUTION: A thermo-couple is built in a lifter pin 3 which lifts a material 10 placed on a test piece table 2. When detecting the temperature of the material 10 by the thermo-couple, the thermo-couple is moved toward the material 10 to bring the tip of the thermo-couple into contact with the bottom face of the material 10. A detection signal from the thermo-couple is transmitted to a temperature controller 4, and the temperature of the material 10 is controlled using a chiller 6 according to a control signal from the temperature controller 4. By bringing the tip of the thermo-couple built in the lifter pin 3 into direct contact with the material 10 at the time of detecting the temperature of the material 10, the temperature of the material can be rapidly and accurately detected to control the temperature to an appropriate value. The thermo-couple may be built in a clamp mechanism for fixing the material 10 on the test piece table or in a transfer arm. COPYRIGHT: (C)2005,JPO&NCIPI
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