发明名称 |
Methods and apparatus for particle reduction in MEMS devices |
摘要 |
A method for assembling a micro-electromechanical system (MEMS) device that includes a micro-machine is described. The method comprises forming the micro-machine on a die, the die having a top surface and a bottom surface, providing a plurality of die bonding pedestals on a surface of a housing, and mounting at least one of the top surface of the die and components of the micro-machine to the die bonding pedestals such that a bottom surface of the die at least partially shields components of the micro-machine from loose gettering material.
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申请公布号 |
US2004222468(A1) |
申请公布日期 |
2004.11.11 |
申请号 |
US20030431418 |
申请日期 |
2003.05.07 |
申请人 |
DCAMP JON B.;CURTIS HARLAN L.;DUNAWAY LORI A.;GLENN MAX C. |
发明人 |
DCAMP JON B.;CURTIS HARLAN L.;DUNAWAY LORI A.;GLENN MAX C. |
分类号 |
B81B7/00;G01C19/56;G01P1/02;(IPC1-7):H01L23/62 |
主分类号 |
B81B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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