| 摘要 |
PROBLEM TO BE SOLVED: To obtain a light modulation element in which an absorption at a mirror or at a light shielding film is extremely low, and which is endurable against high power laser light, and to improve an operational reliability. SOLUTION: In a reflection type light modulation element 100 of a microelectromechanical type in which the reflection optical path of light is varied by dislocating a miniature reflection body 101, an interference mirror 111 having non-absorbing characteristic of light over the spectrum range of incident light is provided at least in the light incident region of the reflection body 101. COPYRIGHT: (C)2005,JPO&NCIPI
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