| 摘要 |
PROBLEM TO BE SOLVED: To provide a catadioptric image-formation optical system which has a relatively large numerical aperture in a vacuum ultraviolet-ray wavelength band and is easily optically adjusted and mechanically designed and has various aberrations including chromatic aberration sufficiently compensated and has≤0.1μm resolution. SOLUTION: The catadioptric image-formation optical system forms an image of a first surface (R) on a second surface (W) and is provided with; a first imaging optical system (G1) of refraction type for forming a first intermediate image of the first surface; a second imaging optical system (G2) which includes a concave reflecting mirror (CM1) and forms a second intermediate image on the basis of a luminous flux from the first intermediate image; a third imaging optical system (G3) which includes a concave reflecting mirror (CM2) and forms a third intermediate image on the basis of a luminous flux from the second intermediate image; and a fourth imaging optical system (G4) of refraction type for forming the final image on the second surface on the basis of a luminous flux from the third intermediate image. The imaging optical system has an effective imaging area having a prescribed shape, which doesn't include an optical axis (AX4) of the fourth imaging optical system, on the second surface. COPYRIGHT: (C)2005,JPO&NCIPI
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