| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized capacitance type external force detection device capable of highly accurate detection. SOLUTION: This device has a first insulator substrate 11, first and second through holes 16 formed penetratingly from the surface thereof to the back, first and second wires 14, 15 formed on the surface of the first insulator substrate, a first semiconductor layer 1 arranged on the back of the first insulator substrate, a second insulator substrate 10 arranged on the back thereof, a first space 7 formed in the first semiconductor layer, a second semiconductor layer 3 arranged on the back of the second insulator substrate, a second space 6 formed in the second semiconductor layer, a deadweight 4 formed in the second space, and a signal processing circuit 5 formed in the first semiconductor layer 1, for detecting displacement of the deadweight. The first wire is connected to the first space on the under surface of the first insulator substrate through the first penetration hole, and the input and a part of the output of the signal processing circuit are connected to the surface of the first insulator substrate by the second wire. COPYRIGHT: (C)2005,JPO&NCIPI
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