| 摘要 |
PROBLEM TO BE SOLVED: To solve the reduction in the film quality of a vapor deposition film caused by the electrostatic charge phenomenon of electrons and defects in a product. SOLUTION: In the indirect heating type hearth liner 13 of a vacuum deposition system 11, an evaporating material 17 is heated by using an electron gun 12. The hearth liner 13 is provided with a material storing part 18 of storing the evaporating material 17 and a heating part 19 where electrons generated from the electronic gun 12 are received to generate heat, so that the material storing part 18 is heated, and the evaporating material 17 stored in the material storing part 18 is indirectly heated via the heating part 19 and is evaporated. The heating face 21 of the heating part 19 is composed of V-shaped grooves with a cross-sectional V shape. COPYRIGHT: (C)2005,JPO&NCIPI
|
