摘要 |
PROBLEM TO BE SOLVED: To provide a pressure-sensitive adhesive tape which does not allow air bubbles to remain when stuck. SOLUTION: The pressure-sensitive adhesive tape 1, being a double-faced one, comprises a pressure-sensitive adhesive material 2 and release materials 3, 4 stuck to both sides of the pressure-sensitive adhesive material 2. When the adhesive tape 1 is used, the release materials 3, 4 are peeled before the adhesive material 2 is stuck to a polishing pad or the like. A plurality of grooves 5 are formed on the pressure-sensitive adhesive surface 2a of the adhesive material 2 to be stuck to a surface plate. The grooves 5 are formed parallel with each other, as can be seen in the plan view. COPYRIGHT: (C)2005,JPO&NCIPI
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