| 摘要 |
An apparatus for forming a pattern has a beam position detector, a fine-section scale corrector, a pulse data selector, and a control pulse signal generator. The beam position detector measures a position of the beam on a scanning-line. The fine-section scale corrector changes a scale of a series of fine-sections to a series of corrected fine-sections, in accordance with a scale-change rate, to change a scale of the pattern. The pulse data selector selects a set of pulse data, corresponding to a length of the corrected fine section that the beam passes, from a series of sets of pulse data. The control pulse signal generator successively generates a sequence of control pulse signals in accordance with the selected set of pulse data.
|
