<p>A method for machining a ceramic substrate containing Al, including providing a slurry between a substrate and a machine tool, the slurry containing alumina abrasive and an additive including a phosphorus compound, and moving the substrate relative to the machine tool.</p>
申请公布号
WO2004096941(A1)
申请公布日期
2004.11.11
申请号
WO2004US09555
申请日期
2004.03.29
申请人
SAINT-GOBAIN CERAMICS & PLASTICS, INC.;LACONTO, RONALD, W.;WARD, DOUGLAS, E.