| 摘要 |
PROBLEM TO BE SOLVED: To apply precision minute processing using high energy rays to a thin TFE polymer sheet several hundreds micrometers or below in thickness which can not keep a plane without unevenness by itself. SOLUTION: While tensile force is applied in the surface direction of a thin sheet 1 to the sheet 1 to stretch the sheet 1, the sheet 1, after being positioned on the surface of a flat specimen table 2 made of a material of the same series as that of the sheet 1, is pressed while being heated and stuck on the surface of the table 2 with flatness kept high by effective adhesive force. Since the materials of the same series are stuck together, no deformation and no peeling occur since no stress change of a contact surface takes place by the change of temperature. Accordingly, precision processing is made possible, which is not affected by irradiation with high energy rays and the diffraction of radiated light. COPYRIGHT: (C)2005,JPO&NCIPI |
