| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing-object delivering apparatus and method which can perform the delivery of manufacturing objects surely without the stagnation of them, between a single sheet transfer line for performing single sheet transfer of such manufacturing objects as wafers, and a batch-processing equipment for performing batch processing of the plurality of manufacturing objects. SOLUTION: The manufacturing-object delivering apparatus 13 for performing the delivery of manufacturing objects W between a single sheet transfer line 20 for performing single sheet transfer of the manufacturing objects W and a batch-processing equipment for performing batch processing of the plurality of manufacturing objects W, wherein the manufacturing objects W to be processed which are subjected to the single sheet transfer performed by the single sheet transfer line 20 are so stored in a container C capable of storing the plurality of manufacturing objects W and capable of delivering them to the batch-processing equipment as to transfer the container C to the batch-processing equipment, and in addition to this, the container C storing the plurality of manufacturing objects W processed-off in the batch-processing equipment is so returned from the batch-processing equipment as to transfer the manufacturing objects W to the side of the single sheet transfer line 20 by taking them out from the container C. COPYRIGHT: (C)2005,JPO&NCIPI |
