| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing device and a manufacturing method of an organic light-emitting display device capable of improving a yield ratio. SOLUTION: An organic layer forming part 110 forming an organic layer, a second electrode forming part 120 forming a boundary layer and a second electrode, and a defect inspection part 130 inspecting defect in vacuum or in an inert gas atmosphere are combined through a middle chamber 140 and a base plate transferring mechanism 160 without being exposed in the air. A defect is inspected at the defect inspection part 130 after forming the organic layer at the organic layer forming part 110 and before forming the boundary layer and the second electrode. Defective base plates are selected and rejected from a defective base plate rejection outlet 130A before formation of a protection film which can not be peeled off, and the films are successively formed only on non-defective base plates. Film-forming is started again from the organic layer on the defective base plate, after a restoration treatment is applied for peeling off an organic layer with defects. The defect inspection may be carried out after the formation of the second electrode and before the formation of the protection film. COPYRIGHT: (C)2005,JPO&NCIPI
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