THREE-DIMENSIONAL CONFOCAL MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a three-dimensional confocal microscope capable of preventing mechanical vibration from occurring in a scanning means in an optical axis direction and also performing scanning in the optical axis direction at high speed. SOLUTION: In the confocal microscope constituted by attaching a confocal scanner to an optical microscope so that the image of a sample can be acquired as a confocal image by the confocal scanner, a surface tension control type variable focus lens having no movable part is used as the field lens of the microscope. COPYRIGHT: (C)2005,JPO&NCIPI