发明名称 Continuous-treatment apparatus and continuous-treatment method
摘要 A continuous-treatment apparatus is provided which subjects a surface of an object, which is targeted for treatments, to continuous plural types of treatments, and is provided with an object carrier, which holds the object and carries the object along a carrying direction, and plural types of treatment units, which are arranged side by side along the carrying direction of the object and subject the object to sequential different treatments at atmospheric pressure or at a pressure near atmospheric pressure. The combination of the plural types of treatment units may be changed at will and any desired type of treatment unit may be added.
申请公布号 US2004221616(A1) 申请公布日期 2004.11.11
申请号 US20040783979 申请日期 2004.02.20
申请人 ASUKE SHINTARO;MORI YOSHIAKI 发明人 ASUKE SHINTARO;MORI YOSHIAKI
分类号 G02F1/13;B65G49/06;C03C17/25;C03C23/00;H01L21/02;(IPC1-7):C03B25/00;B05D3/02 主分类号 G02F1/13
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