发明名称 |
Fixing member for evaporation apparatus |
摘要 |
An electric heater is placed so as to cover an upper opening of a crucible. Then, a plurality of angle members are disposed along the side portions of the electric heater and are pressed and fixed by clamps. The clamp includes, at its bottom, a curved portion formed by bending a plate-like spring member into a convex shape, and generates pressing force between the curved portion and corresponding claw portions at the upper edge, thereby clamping the crucible.
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申请公布号 |
US2004221801(A1) |
申请公布日期 |
2004.11.11 |
申请号 |
US20040838505 |
申请日期 |
2004.05.04 |
申请人 |
OCHIAI MASATOSHI;IWASE HIROTOSHI;KATO SEIZO;ENDO TETSURO |
发明人 |
OCHIAI MASATOSHI;IWASE HIROTOSHI;KATO SEIZO;ENDO TETSURO |
分类号 |
H05B33/10;C23C14/24;H01L51/50;(IPC1-7):C30B1/00;C30B15/00;C30B21/06;C30B27/02;C30B28/10;C30B30/04 |
主分类号 |
H05B33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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