发明名称 Fixing member for evaporation apparatus
摘要 An electric heater is placed so as to cover an upper opening of a crucible. Then, a plurality of angle members are disposed along the side portions of the electric heater and are pressed and fixed by clamps. The clamp includes, at its bottom, a curved portion formed by bending a plate-like spring member into a convex shape, and generates pressing force between the curved portion and corresponding claw portions at the upper edge, thereby clamping the crucible.
申请公布号 US2004221801(A1) 申请公布日期 2004.11.11
申请号 US20040838505 申请日期 2004.05.04
申请人 OCHIAI MASATOSHI;IWASE HIROTOSHI;KATO SEIZO;ENDO TETSURO 发明人 OCHIAI MASATOSHI;IWASE HIROTOSHI;KATO SEIZO;ENDO TETSURO
分类号 H05B33/10;C23C14/24;H01L51/50;(IPC1-7):C30B1/00;C30B15/00;C30B21/06;C30B27/02;C30B28/10;C30B30/04 主分类号 H05B33/10
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