LIQUID COMPOSITION FOR FORMING FERROELECTRIC THIN FILM AND METHOD FOR FORMING FERROELECTRIC THIN FILM

摘要

A liquid composition for forming a thin film is disclosed which enables to form a ferroelectric thin film with excellent characteristics even through firing at low temperatures. A method for forming a ferroelectric thin film using such a liquid composition is also disclosed. The liquid composition for forming a ferroelectric thin film is characterized in that ferroelectric oxide particles composed of plate or needle crystals which are represented by the general formula: ABO3 (wherein A represents at least one selected from the group consisting of Ba<2+>, Sr<2+>, Ca<2+>, Pb<2+>, La<2+>, K<+> and Na<+>, and B represents at least one selected from the group consisting of Ti<4+>, Zr<4+>, Nb<5+>, Ta<5+> and Fe<3+>) and have a perovskite structure, an average primary particle diameter of not more than 100 nm and an aspect ratio of not less than 2 are dispersed in a liquid medium and a soluble metal compound which forms a ferroelectric oxide when heated is further dissolved in the liquid medium.