Temperature-resistant electronic sensor/actuator has element fixed in housing on stack of layers with different thermal expansion coefficient to stepwise adapt element coefficient to that of housing

摘要

The device has a micromechanical element (12) forming a sensor or actuator element, a housing (11) in which the element is arranged and contact elements (17) for electrically connecting the element. The element is fixed in the housing on a stack of layers (13,14) with different coefficients of thermal expansion that stepwise adapt the coefficient of thermal expansion of the element to that of the housing. An independent claim is also included for the following: (a) a method of manufacturing a sensor or actuator.