| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid crystal display that can deter an alignment defect due to a step on a substrate surface from being generated. SOLUTION: The entire surface of an array substrate 10 where a TFT 95 is formed is coated with a flattening film 18 functioning as a 2nd inter-layer insulating film (Fig.(b)). Then the flattening film 18 is exposed (exposure quantity: 200 mJ/cm2) to irradiating light (i line) through a photomask 41 having an opening pattern 41a arranged (Fig.(c)). Further, the flattening film 18 is exposed (exposure quantity: 50 mJ/cm2) to irradiating light through a photomask 42 having an opening pattern 42a arranged (Fig.(d)). Then spray development is carried to remove (etch) exposed areas, and bleach exposure is carried out by a contact exposing machine. Consequently, a 2nd contact hole 20 penetrating the flattening film 18 is formed and a recessed part 80 is formed in the flattening film 18 on the area where the TFT 95 is formed (Fig.(e)). COPYRIGHT: (C)2005,JPO&NCIPI |
