| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device capable of improving control performance of a stage and improving exposure precision of an exposure device. SOLUTION: A stage device for moving by driving a driven element is provided with a movable slider for placing the driven element and moving, a movable slider driving part, a feedforward compensator for calculating driving volume by the movable slider driving part at the time that the movable slider moves from a starting position to a target position based on a starting position of the movable slider, and the target position to which the movable slider should move, a movable slider position sensor for detecting the position of the movable slider, and a feedback compensator for calculating driving volume by the movable slider by the driving part at the time that the movable slider moves from the starting position to the target position based on the target position to which the movable slider should move and the position of the movable slider. COPYRIGHT: (C)2005,JPO&NCIPI
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