| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method of a semiconductor circuit, a burn-in system and semiconductor preparations which can omit an inspection process when burn-in process in the state of a wafer is performed. SOLUTION: The semiconductor circuit is provided with a logic part 202 turning to burn-in object, a signal supply circuit 201 for burn-in tests which supplies a signal for burn-in tests to the logic part 202, a self-diagnostic circuit 204 for diagnosing destruction/nondestruction of a circuit after supplying a signal for burn-in tests to the logic part 202, and a storage element 102 for storing a state when it is determined by the self-diagnostic circuit 204 that the logic part 202 is destroyed. When burn-in is performed, the burn-in system generates a signal for triggering a signal supply circuit 201 for burn-in tests, and inputs an output signal from the self-diagnostic circuit 204. When destruction of the logic part 202 is detected from the circuit 204, it is made to be memorized in the storage element 102. COPYRIGHT: (C)2005,JPO&NCIPI
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