| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic driver which is easy to manufacture, has a high yield and carries out performance as designed by suppressing an action error due to exterior force. SOLUTION: A movable body 6 is installed on the top side of a coplanar line 3 formed on a substrate 2, and is driven by using the electrostatic attracting force so that position is varied to the direction in which a space between the moving body 6 and the substrate 2 is made bigger. In a state when voltage is not applied to moving body driving means, a moving electrode 10 and the coplanar line 3 are brought into a state of contact by having the moving body 6 energized to the substrate 2 side by a beam 7, and the moving electrode 10 and the coplanar line 3 are brought into a state of non-contact by moving away the moving body 6 from the substrate 2 against the energy of the beam 7 by applying voltage to the moving body driving means. An aligning guide 9 is formed by aligning the position in the direction along a surface of the substrate of the moving body 6 when the moving electrode 10 and the planer line 3 are brought into a state of contact and the moving body 6 is installed in a set position. COPYRIGHT: (C)2005,JPO&NCIPI
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