| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for measuring dynamic linearity to be a basis of dynamic measurement on the dynamic performance of an eddy current displacement sensor. SOLUTION: Elastic wave pulses are generated inside a metal rod 5 by making a face of the metal rod 5 collide with flying bodies projected from double-structure projecting tubes. Dynamic displacements of the face of the metal rod which occur when the generated elastic wave pulses reach the other face of the metal rod 5 are simultaneously measured by the eddy current displacement sensor 9 and a laser interferometer 7 for evaluating dynamic linearity. By comparing, in a time domain and a frequency domain, output signals of the eddy current displacement sensor 9 acquired in the case that a flying body 2 and a flying body 1 are each made to collide with the metal rod 5 by projecting the flying object 2 from only the inside projecting tube 16 and the flying object 1 from only the outside projecting tube 15 with an output signal of the eddy current displacement sensor 9 acquired in the case that the flying bodies 1 and 2 are made to simultaneously collide with the metal rod 5 by projecting them from both the inside projecting tube 16 and the outside projecting tube 15, the dynamic linearity of the eddy current displacement sensor 9 is measured. COPYRIGHT: (C)2005,JPO&NCIPI
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