| 摘要 |
PROBLEM TO BE SOLVED: To provide a slit nozzle capable of simply machining the slit nozzle and generating no capillary phenomenon, and a treating liquid feeding device using the slit nozzle. SOLUTION: In the slit nozzle, the treating liquid is fed onto a surface of the object to be treated in a predetermined width. The above slit nozzle 1 is constituted by joining left and right half bodies 2, 3 to each other. One of them is made of a metal material and the other is made of a resin material. In the treating liquid feeding device provided with the slit nozzle, the slit nozzle is provided at a predetermined position of a circulation route 8 of the temperature-controlled treating liquid. COPYRIGHT: (C)2005,JPO&NCIPI
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