| 发明名称 |
Semiconductor stress buffer coating edge bead removal compositions and method for their use |
| 摘要 |
An edge bead remover composition that includes at least one ketone selected from the group consisting of: wherein R1 and R2 are independently selected from the group consisting of: methyl, ethyl, n-propyl, n-butyl, sec-butyl, and isobutyl, and wherein n equals 1 or 2; at least one ester other than lactones; and at least one lactone.
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| 申请公布号 |
US2004224516(A1) |
申请公布日期 |
2004.11.11 |
| 申请号 |
US20040865054 |
申请日期 |
2004.06.10 |
| 申请人 |
ARCH SPECIALTY CHEMICALS, INC. |
发明人 |
PETERSON LAURIE J.;HOPLA RICHARD E.;NAIINI AHMAD A.;WEBER WILLIAM D.;WATERSON PAMELA J. |
| 分类号 |
G03F7/42;C11D7/26;C11D7/50;C11D11/00;G03F7/16;G03F7/20;H01L21/027;H01L21/308;H01L21/311;(IPC1-7):H01L21/31 |
主分类号 |
G03F7/42 |
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