发明名称 |
Method of determining the concavity and convexity on sample surface, and charged particle beam apparatus |
摘要 |
A method and apparatus suitable for determining the concavity and convexity of line and space patterns formed on a sample. A profile is formed based on a charged-particle beam scan, the profile having a peak. When one foot portion of the peak converges more gradually than the other foot portion, a portion of the sample corresponding to the one foot portion is determined to be a convex portion. Alternatively, when one foot portion of the peak converges more steeply than the other foot portion, a portion of the sample corresponding to the one foot portion is determined to be a concave portion.
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申请公布号 |
US2004222375(A1) |
申请公布日期 |
2004.11.11 |
申请号 |
US20040779749 |
申请日期 |
2004.02.18 |
申请人 |
KIMURA YOSHIHIRO;KOMURO OSAMU;SASAJIMA FUMIHIRO |
发明人 |
KIMURA YOSHIHIRO;KOMURO OSAMU;SASAJIMA FUMIHIRO |
分类号 |
G01B15/04;G01B15/08;G01N23/225;H01J37/28;H01L21/027;H01L21/66;(IPC1-7):G01N23/225 |
主分类号 |
G01B15/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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