发明名称 PRECISION WORKING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a precision working device capable of greatly improving the productivity by reducing a stand-by time of a working spindle as much as possible. SOLUTION: A working system comprises a working device, which is provided with working tables 22A and 22B moving between a working position and loading/unloading position on a bed 10 on the X-axis, for executing a precision working to a work on one working table existing on the work position, a plurality of loading/unloading devices for individually supplying and taking out works 100 to each working table when each working table is respectively at the loading/unloading position of works, and a feeding device for respectively independently feeding each working table. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004319894(A) 申请公布日期 2004.11.11
申请号 JP20030114285 申请日期 2003.04.18
申请人 TOSHIBA MACH CO LTD 发明人 AKIYAMA SHIGETAKA
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
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