QUANTITATIVELY DETERMINING METHOD OF PHOSPHORUS

摘要

PROBLEM TO BE SOLVED: To provide a quantitatively determining method capable of simultaneously analyzing the phosphorus P derived from inorganic phosphorus compound and the phosphorus P derived from organic phosphorus compound. SOLUTION: This quantitatively determining method of phosphorus includes a process to generate phosphoric acid by decomposing organic phosphorus compound in mixture of inorganic phosphorus compound and organic phosphorus compound and a process for quantitatively determining the inorganic phosphorus compound the phosphoric acid generated by decomposing the organic phosphorus compound by using an element analyzer. In addition, the mixture of the inorganic phosphorus compound and the organic phosphorus compound is collected from gas or a surface of a wafer. COPYRIGHT: (C)2005,JPO&NCIPI