SAPPHIRE SUBSTRATE AND ITS PRODUCTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a sapphire substrate in which chipping by scribing hardly occurs and its production method. SOLUTION: The sapphire substrate is characterized in that the orientation flat of the sapphire in which the major face is c-face, is formed on any one specific face of the faces vertical to the equivalent directions of <-1 -1 2 0>, <2 -1 -1 0>, and <-1 2 -1 0>. COPYRIGHT: (C)2005,JPO&NCIPI