发明名称 ULTRASONIC ELECTRIC POWER MONITORING APPARATUS AND ULTRASONIC CLEANING APPARATUS
摘要 PROBLEM TO BE SOLVED: To solve a problem in which the output of an ultrasonic oscillator is necessary to be set so that optimum cleaning condition for an object to be cleaned is attained in ultrasonic cleaning, therefore, the ultrasonic output electric power of the ultrasonic oscillator is measured by an ultrasonic wattmeter, and when a plurality of ultrasonic oscillators are used, one ultrasonic wattmeter must measures every ultrasonic oscillator while successively changing the connection of the wattmeter with the ultrasonic oscillators with the result that measuring work requires much time and simultaneous measurement and simultaneous display of the ultrasonic output electric power are impossible and more appropriate control of electric power cannot be performed. SOLUTION: In an ultrasonic electric power monitoring apparatus, the desired number of unitized ultrasonic wattmeters 2 are gathered and are stored in a cabinet 3 to form an integrated multi-channel ultrasonic wattmeter 1. Each of the ultrasonic wattmeters 2 is interposed between ultrasonic oscillators 5 and ultrasonic vibrators 6 different from each other and ultrasonic output electric power of each ultrasonic oscillator 5 is measured and displayed at the same time and centralized control of the ultrasonic output electric power of the plurality of ultrasonic oscillators 5 can be attained. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004313988(A) 申请公布日期 2004.11.11
申请号 JP20030113808 申请日期 2003.04.18
申请人 SHIMADA PHYS & CHEM IND CO LTD 发明人 YAMAMOTO KATSUNORI
分类号 G01R21/00;B08B3/12;H01L21/304;(IPC1-7):B08B3/12 主分类号 G01R21/00
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