| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a chemical bottle which is resistant to corrosion by a chemical and a substrate treatment apparatus using the bottle. <P>SOLUTION: An intermediate layer for preventing invasion of the chemical is provided between a metallic container casing and a resin-made coating layer. Thus, the coating layer protects the intermediate layer, and in addition the intermediate layer prevents the container casing from being corroded with the chemical permeating through the coating layer. As a result, the chemical is prevented from being contaminated with corrosion products such as metallic ions. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
