发明名称 VESSEL FOR GROWING SEMICONDUCTOR SINGLE CRYSTAL AND METHOD FOR MANUFACTURING COMPOUND SEMICONDUCTOR SINGLE-CRYSTAL
摘要 PROBLEM TO BE SOLVED: To repeatedly use a vessel for growing single crystals by drastically improving the yield of good quality single crystals almost free from crystal defects such as transposition without necessitating complicated equipment in a method for manufacturing a compound semiconductor single crystal by an LEC method. SOLUTION: The vessel 9 for growing the single crystal, satisfying following conditions (1) and (2) is used. (1) The vessel 9 is made by using isotropic carbon as a base material. (2) The vessel 9 is coated with any of pyrolytic carbon, pyrolytic graphite and glassy carbon, each of which has a coefficient of thermal expansion adjusted nearly equal to that of the isotropic carbon used as the base material. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004315269(A) 申请公布日期 2004.11.11
申请号 JP20030110024 申请日期 2003.04.15
申请人 HITACHI CABLE LTD 发明人 WACHI MICHINORI
分类号 C30B15/10;C30B27/02;C30B29/42;(IPC1-7):C30B15/10 主分类号 C30B15/10
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