MANUFACTURING LINE FOR SUBSTRATE FABRICATED WITH OPTICAL ELEMENT AND METHOD FOR MANUFACTURING SUBSTRATE FABRICATED WITH OPTICAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing line for a substrate fabricated with optical elements for manufacturing a substrate where a plurality of optical elements are fabricated in appropriate arrangement by exposure for a plurality of times, and to provide a method for manufacturing a substrate fabricated with optical elements. SOLUTION: The manufacturing line 9 of a substrate fabricated with optical elements is equipped with: an exposure apparatus 17 to expose and fabricate a plurality of optical elements 70 and a plurality of position indicating patterns 80 by exposure for a plurality of times; a developing apparatus 19 to develop the optical elements 70 and the position indicating patterns 80 fabricated by exposure; a position detecting apparatus 21; and an exposure position controlling apparatus 24. The position detecting apparatus 21 detects the positional relation between the optical elements 70 based on the positional relation between the developed position indicating patterns 80. The exposure position controlling apparatus 24 controls the exposure apparatus 17 based on the detection result of the position detecting apparatus 21 and adjusts the exposure position with respect to the substrate 65 having a photosensitive material. COPYRIGHT: (C)2005,JPO&NCIPI