FOREIGN MATTER INSPECTION METHOD AND DEVICE

摘要

PROBLEM TO BE SOLVED: To detect foreign matters by using a threshold which can be used on any background and does not make a detection error. SOLUTION: A set of data of the intensity of foreign matters and the threshold for detecting the foreign matters from a plurality of sample images is obtained in advance to calculate a regression curve and the following formula; threshold = coefficient×minimum intensity + offset. The threshold is determined based on the formula and is used as the threshold to threshold process the image for foreign matter inspection. COPYRIGHT: (C)2005,JPO&NCIPI