| 摘要 |
PROBLEM TO BE SOLVED: To certainly inspect the surface of a substrate with high precision and to prevent the occurrence of damage or the like in the substrate when performing inspection. SOLUTION: An air floating means 20 for floating the substrate 1 and a support plate 30 are provided on a base stand 11. The air floating means 20 is constituted of air jet plates 21-24 provided with a large number of air jet orifices 25 and the support plate 30, which are provided with a large number of support pins 31 for supporting the backside of the substrate 1 and constituting a substrate support means, is provided under the second and third air jet plates 22 and 23 in a liftable manner. When carrying-in and out and pitch-feeding the substrate 1, the substrate 1 is floated by pressure air and, during inspection, the backside of the substrate at the positions on both sides of an inspection zone Z, where the inspection is performed, is supported by the support pins 31. COPYRIGHT: (C)2005,JPO&NCIPI
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