FLUORINATED CYCLIC COMPOUND, POLYMERIZABLE FLUOROMONOMER, FLUOROPOLYMER, RESIST MATERIAL COMPRISING THE SAME, AND METHOD OF FORMING PATTERN WITH THE SAME

摘要

A novel fluorinated cyclic compound which has an oxacyclopentane or oxacyclobutane structure derived from a norbornadiene compound and hexafluoroacetone and which may be represented by the following formula (1) or (2); a fluoropolymer obtained by polymerizing or copolymerizing the fluorinated cyclic compound or a derivative thereof; an excellent resist material comprising the fluoropolymer; and a method of forming a fine pattern with the resist material.