| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma treatment device, which prevents damage on a material to be treated and unevenness in treatment effect, even if a long length material is treated, while having excellent maintainability of inside the chamber and electrode. <P>SOLUTION: Electrode groups of approximately plane shape having a plurality of round bar shaped electrodes 41, 61, arranged in parallel, or flat plane type electrodes are arranged upright in vertical direction, and opposed to each other inside a first chamber 4 and a second chamber 6. The first chamber 4 and the second chamber 6 each comprises right and left split chamber members 4a, 4b, 6a, 6b which travel horizontally with respect to the electrode groups or electrodes to open the first chamber 4 and the second chamber 6. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
