| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron microscope capable of arbitrarily setting a dark-field STEM, a bright-field STEM or a capturing angle of an EELS (a diffusion angle on a sample face). <P>SOLUTION: An electron lens is disposed between an electron detector of a ring-like dark-field and an electron detector of a bright-field, an electron lens is disposed between the detector of the bright-field and an EELS spectrometer, and an object point of the EELS spectrometer is made to be a virtual image. According to this structure, it is possible to make a mechanical incident angle to the EELS spectrometer small without changing capturing angles to the electron detector of the dark-field and to the electron detector of the bright-field. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
