| 摘要 |
PROBLEM TO BE SOLVED: To shorten a TEM observing and analyzing time by manufacturing a sample of which the particle density is higher than that of a sample manufactured by the conventional replica manufacturing method and to obtain data high in representativeness in relation to the chemical composition and particle size distribution of the inclusions or precipitate in a metal material or the dispersion density in a metal material matrix. SOLUTION: In a SPEED (non-acquous solvent-based constant potential electrolytic) method capable of stably extracting even an unstable fine enclosure or precipitate, for example, a 2 mass% trimethanolamine-1 mass% TMAC (tetramethyl ammonium chloride)-methanol mixed solution is used as a liquid electrolyte. Further, residue, which is obtained by electrolyzing an amount corresponding to about 50-100 times that of a conventional method and extracting the electrolysate, is dispersed in an organic solvent and the dispersion obtained is dripped on a support film and dried to make a sample having an extremely large number of residue particles. Further, a replica sample having a large area as compared with the conventional replica sample is manufactured and subjected to an optical microscope, SEM (scanning electronic microscope), X-ray analysis and the like to obtain the data on a larger number of particles and data high in representativeness. COPYRIGHT: (C)2005,JPO&NCIPI
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