发明名称 |
MICROMECHANICALLY ACTUATABLE OPTOELECTRONIC COMPONENT |
摘要 |
The invention relates to a micromechanically actuatable optoelectronic component comprising a first DBR mirror (1), a second DBR mirror (2) and a cavity (3), which is situated between both DBR mirrors (1, 2) and which has a length (L) that can vary by actuation. Both DBR mirrors (1, 2) have layer cycles (I to IV) each having at least one first layer (Ai, Ci), which has a thickness (dAi, dCi) and a refractive index (nAi, nCi), and having at least one second (Bi, Di), which has a thickness (dBi, dDi) and a refractive index (nBi, nDi). According to the invention, at least one of the two DBR mirrors (1, 2) has at least one layer cycle (I to IV) that differs from another layer cycle (I to IV) of the same DBR mirror (1, 2) by the thickness (dAi, dBi or dCi, dDi) and/or the refractive index (nAi, nBi or nCi, nDi) of at least one layer (Ai, Bi or Ci, Di). |
申请公布号 |
WO2004096695(A2) |
申请公布日期 |
2004.11.11 |
申请号 |
WO2004DE00605 |
申请日期 |
2004.03.23 |
申请人 |
UNIVERSITAET KASSEL;HILLMER, HARTMUT;DALEIDEN, JUERGEN;PROTT, CORNELIA;ROEMER, FRIEDHARD;IRMER, SOEREN;TARAF, AMER;SCHUELER, STEFAN;RANGELOW, VENTZESLAV |
发明人 |
HILLMER, HARTMUT;DALEIDEN, JUERGEN;PROTT, CORNELIA;ROEMER, FRIEDHARD;IRMER, SOEREN;TARAF, AMER;SCHUELER, STEFAN;RANGELOW, VENTZESLAV |
分类号 |
H01S5/12;H01S5/14;H01S5/183 |
主分类号 |
H01S5/12 |
代理机构 |
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