WATER SEPARATING DEVICE AND METHOD OF VACUUM LINE, POLISHING APPARATUS USING THE DEVICE, AND METHOD FOR MANUFACTURING DEVICE USING THE APPARATUS

摘要

PROBLEM TO BE SOLVED: To enable continuous operation of a vacuum device without stopping a vacuum source even when a large quantity of water to be separated from air is present in a vacuum line.

SOLUTION: The apparatus comprises a first water storage tank TA and a second water storage tank TB provided in the vacuum line 70 as storage means. When a predetermined quantity of water in the vacuum line 70 is stored any one of the first and second water storage tanks TA, TB, only one of the tanks having the predetermined quantity of water stored therein is shut off from the vacuum line 70 and then discharged therefrom. Meanwhile, the other water storage tank maintains the communication with the vacuum line 70 to keep a vacuum state and stores the water in the vacuum line 70.

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