发明名称 SURFACE TREATMENT APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a surface treatment apparatus constituted so that an injected treatment liquid is allowed to go straight on so as not to be diffused to spread and prevented from flowing on the surface of a substrate material in the first place, the surface treatment of the substrate material is uniformed in the second plate and the jet impacts against the substrate material are dispersed without being overlapped with each other and the surface treatment of the substrate material is uniformized from this aspect in the third place. SOLUTION: The surface treatment apparatus 3 is constituted so as to eject the treatment liquid B to the substrate material A to treat the surface of the substrate material A and has a liquid tank 5 filled with the treatment liquid B' as the ejected treatment liquid B, the conveyor 6 arranged in the treatment liquid of the liquid tank 5 to feed the substrate material A and a large number of perforated spray nozzles 7 arranged in the treatment liquid B' of the liquid tank 5 and located in opposed relation to the substrate material A to eject the treatment liquid B. The ejected treatment liquid B receives the resistance of the treatment liquid B' to be regulated and goes straight on to be reflected by the substrate material A. The front and rear spray nozzles 7 are shifted left and right without being located in opposed relationship. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004313827(A) 申请公布日期 2004.11.11
申请号 JP20030107293 申请日期 2003.04.11
申请人 TOKYO KAKOKI KK 发明人 NIIYAMA KISABURO;SUGAWARA SEIJI
分类号 B65G49/02;B05B13/02;B65G49/06;H01L21/304;H01L21/677;H01L21/68;(IPC1-7):B05B13/02 主分类号 B65G49/02
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