| 摘要 |
PROBLEM TO BE SOLVED: To reduce the labor of an observer by eliminating a need of aperture switching operation on the side of an illumination optical system for each objective lens having a power being in a relatively wide range, without spoiling the effect of observation techniques. SOLUTION: An optical microscope has an imaging optical system and a light control member 14L arranged in a pupil position 11 of the imaging optical system, and the imaging optical system includes a light source, an illumination optical system, an aperture 13a arranged in a pupil position 8 of the illumination optical system, and objective lenses 10L. The aperture 13a has such a shape that it covers a part of a ring having an optical axis 6 as the center, and NAc>0.7NAo is satisfied wherein NAc is a numerical aperture which a light beam passing the innermost side of the aperture 13a can take on the surface of the sample 3, and NAo is a minimum value out of respective numerical apertures of the plurality of objective lenses 10L for use. A light absorbing region which involves a region conjugate to the aperture 13a and has a phase changing function of a ring shape having the optical axis ad the center is arranged on the light control member 14L, and only one aperture 13a is used in common for the plurality of objective lenses for use having different powers to perform oblique illumination observation. COPYRIGHT: (C)2005,JPO&NCIPI
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